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Transducers for AutoWafer and AutoWafer Pro
Sonix S-series transducers are designed in-house to meet the demanding requirements of semiconductor manufacturing. We offer the collaborative expertise to help customers choose the best transducer for their application, based on three primary considerations:
- Resolution: Spatial resolution determines the smallest features and defects customers can see in x-y dimensions. Depth resolution determines the thinnest layers that can be resolved. Both spatial and depth resolution improve with increasing frequency. However, there’s a tradeoff between frequency and penetration. The goal is to choose a frequency sufficient to penetrate to and detect the defects customers are looking for.
- Focal zone determines the depth of focus in the z dimension, or how many layers you can see clearly in a scan. Here, the tradeoff is that a deeper focal zone means lower spatial resolution. The goal is to pick the highest frequency that will penetrate to the interface of interest, such as TSVs, while providing optimal resolution.
- Focal length determines the depth of penetration within the silicon where resolution and focus are at their maximum.
Sonix Transducers
- Designed in-house. Sonix designs its own transducers, optimizing spatial and depth resolution for the best possible imaging on actual samples of the devices our customers manufacture. A generic transducer simply can’t match Sonix image quality.
- Wide frequency range. We offer more than 40 transducers from 15MHz to 300MHz, covering the full range of frequencies required in microelectronic manufacturing.
- Robust construction. Sonix transducers are designed to withstand the demands of nonstop operation in high-throughput production environments.
- S-series transducers. Sonix’s advanced transducers incorporate proprietary technology to improve signal sensitivity and spatial resolution, reduce delay line reflections and provide more robust performance.
